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Proceedings Paper

In-Situ Metrology And Machine Based Interferometry For Shape Determination
Author(s): P . A. McKeown; W. J. Wills-Moren; R. F . Read
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Paper Abstract

A brief description is given of the successful development of a large computer controlled machine for diamond turning aluminium alloy X-ray mirror substrates (1.5 m (60 in.) dia., 600 mm (24 in.) axial length). The in situ metrology facility for axial profile, roundness and diameter measurement is described, together with the technique for automatic programming of the final tool path to compensate for errors of workpiece deflection, tool setting and edge radius, etc.. Examples are based on the ROSAT and SXT mirrors for which the axial and radial location/mounting surfaces are produced with precise reference to the reflecting surfaces. Adaptation of this type of ultra-precision machine/metrology facility to the production of other types of optical components is also discussed.

Paper Details

Date Published: 1 January 1987
PDF: 10 pages
Proc. SPIE 0802, In-Process Optical Metrology for Precision Machining, (1 January 1987); doi: 10.1117/12.967101
Show Author Affiliations
P . A. McKeown, Cranfield Institute of Technology (United Kingdom)
W. J. Wills-Moren, Cranfield Institute of Technology (United Kingdom)
R. F . Read, Cranfield Institute of Technology (United Kingdom)

Published in SPIE Proceedings Vol. 0802:
In-Process Optical Metrology for Precision Machining
Peter Langenbeck, Editor(s)

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