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Proceedings Paper

Oxygen Ion Cleaning Of Organic Contaminant Films
Author(s): T. J. Deguchi; C. B. Kalem
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Paper Abstract

The feasibility of using low energy (<30 eV) oxygen ions to clean optics has been demonstrated, It was found that the removal rate of a hydrocarbon film is between.10-23 and 10-24 cm /ion. These rates imply that a one meter diameter optic with a 1000 Å layer of organic contaminant can be cleaned with 10 mole (0.32 milligram) of oxygen impinging on the surface. The removal rate varied with the thickness of the film; the lower layers of the film were more difficult to remove than the outer layers. The effect of the ions on the scatter of a gold mirror was also studied. It was determined that the ions increased the scatter by less than a factor of two.

Paper Details

Date Published: 1 January 1987
PDF: 6 pages
Proc. SPIE 0777, Optical Systems Contamination: Effects, Measurement, Control, (1 January 1987); doi: 10.1117/12.967095
Show Author Affiliations
T. J. Deguchi, Hughes Aircraft Company (United States)
C. B. Kalem, Hughes Aircraft Company (United States)

Published in SPIE Proceedings Vol. 0777:
Optical Systems Contamination: Effects, Measurement, Control
A. Peter M. Glassford, Editor(s)

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