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Proceedings Paper

Analysis Of Particulate Contamination Buildup On Surfaces
Author(s): J. D. Buch; M. K. Barsh
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Paper Abstract

A method is derived for estimating the relationships between clean room air cleanliness class (FED-STD-209B), exposure time and surface cleanliness level (MIL-STD-1246A). The basis of the method is extrapolation of Hamberg's data on particulate fallout rates observed in clean rooms (J. Envr. Sci. May/June, p.15, 1982). The results are presented in simplified form to estimate clean room requirements for different surface cleanliness levels. A discussion is provided on the particle size distributions observed by Hamberg and Shon (30th Ann. Mtg., Institute for Environmental Sciences).

Paper Details

Date Published: 1 January 1987
PDF: 12 pages
Proc. SPIE 0777, Optical Systems Contamination: Effects, Measurement, Control, (1 January 1987); doi: 10.1117/12.967066
Show Author Affiliations
J. D. Buch, Aerojet Electro Systems Company (United States)
M. K. Barsh, Aerojet Electro Systems Company (United States)


Published in SPIE Proceedings Vol. 0777:
Optical Systems Contamination: Effects, Measurement, Control
A. Peter M. Glassford, Editor(s)

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