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Proceedings Paper

A New Approach For Thickness Modulation Measurement From Diffraction Data For Nonlinear Recording Materials
Author(s): J. Frejlich; L. Cescato; G. F. Mendes
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Paper Abstract

A differential method based on diffraction from a low modulated holographic grating is aprlied for measuring the thickness modulation of a positive photoresist via its rate of development. Real-time measurements are performed during wet development and results are compared with simultaneously measured reflectivity interference curves.

Paper Details

Date Published: 18 May 1987
PDF: 4 pages
Proc. SPIE 0702, International Topical Meeting on Image Detection and Quality, (18 May 1987); doi: 10.1117/12.966800
Show Author Affiliations
J. Frejlich, Universidade Estadual de Campinas (Brazil)
L. Cescato, Universidade Estadual de Campinas (Brazil)
G. F. Mendes, Universidade Estadual de Campinas (Brazil)

Published in SPIE Proceedings Vol. 0702:
International Topical Meeting on Image Detection and Quality
Lucien F. Guyot, Editor(s)

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