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Proceedings Paper

Development Of A Ccd For Detection Of Gas-Phase Electron Diffraction Patterns
Author(s): I. Debusschere; J. Sevenhans; E. Bronckaers; C. Claeys; G. Declerck
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Paper Abstract

A linear CCD-imager has been developed for detection of gas-phase electron diffraction patterns. The gain of the photosites is calculated and compared with experimental results. The influence of the process modification for optimal electron gain, on optical and electrical characteristics is discussed.

Paper Details

Date Published: 18 May 1987
PDF: 4 pages
Proc. SPIE 0702, International Topical Meeting on Image Detection and Quality, (18 May 1987); doi: 10.1117/12.966718
Show Author Affiliations
I. Debusschere, IMEC (Belgium)
J. Sevenhans, IMEC (Belgium)
E. Bronckaers, IMEC (Belgium)
C. Claeys, IMEC (Belgium)
G. Declerck, IMEC (Belgium)


Published in SPIE Proceedings Vol. 0702:
International Topical Meeting on Image Detection and Quality
Lucien F. Guyot, Editor(s)

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