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Proceedings Paper

Mirror Surface Metrology And Polishing For AXAF/TMA
Author(s): Albert Slomba; Richard Babish; Paul Glenn
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Paper Abstract

The achievement of the derived goals for mirror surface quality on the Advanced X-ray Astrophyscis Facility (AXAF), Technology Mirror Assembly (TMA) required a combination of state-of-the-art metrology and polishing techniques. In this paper, we summarize the derived goals and cover the main facets of the various metrology instruments employed, as well as the philosophy and technique used in the polishing work. In addition, we show how progress was measured against the goals, using the detailed error budget for surface errors and a mathematical model for performance prediction. The metrology instruments represented a considerable advance on the state-of-the-art and fully satisfied the error budget goals for the various surface errors. They were capable of measuring the surface errors over a large range of spatial periods, from low-frequency figure errors to microroughness. The polishing was accomplished with a computer-controlled process, guided by the combined data from various metrology instruments. This process was also tailored to reduce the surface errors over the full range of spatial periods.

Paper Details

Date Published: 14 July 1986
PDF: 15 pages
Proc. SPIE 0597, X-Ray Instrumentation in Astronomy, (14 July 1986); doi: 10.1117/12.966560
Show Author Affiliations
Albert Slomba, Perkin-Elmer Corporatior (United States)
Richard Babish, Perkin-Elmer Corporation (United States)
Paul Glenn, Perkin-Elmer Corporation (United States)


Published in SPIE Proceedings Vol. 0597:
X-Ray Instrumentation in Astronomy
J. Leonard Culhane, Editor(s)

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