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Proceedings Paper

Design and fabrication of SU-8 MEMS electrostatically tunable optical Fabry-Perot cavity based on photolithography technique
Author(s): L. Mehrvar; S. Nouri; M. Taghavi; F. Beygi Azar; M. Sadegh Cheri; M. I. Zibaii; M. H. Ghezelaiagh; H. Latifi
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Paper Abstract

In this paper, we report a design and fabrication of MEMS electrostatically tunable Fabry-Perot (METFP) cavity sensor. The mirror of METFP sensor is fabricated by SU-8 photoresist for the first time. The sensor is the combination of optical fiber and microelectromechanical systems (MEMS) technologies. The voltage sensitivity of METFP is 0.036 nm/V and the resolution of voltage measurement is 0.277 V.

Paper Details

Date Published: 17 October 2012
PDF: 4 pages
Proc. SPIE 8421, OFS2012 22nd International Conference on Optical Fiber Sensors, 84212M (17 October 2012); doi: 10.1117/12.966338
Show Author Affiliations
L. Mehrvar, Shahid Beheshti Univ. (Iran, Islamic Republic of)
S. Nouri, Shahid Beheshti Univ. (Iran, Islamic Republic of)
M. Taghavi, Shahid Beheshti Univ. (Iran, Islamic Republic of)
F. Beygi Azar, Shahid Beheshti Univ. (Iran, Islamic Republic of)
M. Sadegh Cheri, Shahid Beheshti Univ. (Iran, Islamic Republic of)
M. I. Zibaii, Shahid Beheshti Univ. (Iran, Islamic Republic of)
M. H. Ghezelaiagh, Shahid Beheshti Univ. (Iran, Islamic Republic of)
H. Latifi, Shahid Beheshti Univ. (Iran, Islamic Republic of)


Published in SPIE Proceedings Vol. 8421:
OFS2012 22nd International Conference on Optical Fiber Sensors
Yanbiao Liao; Wei Jin; David D. Sampson; Ryozo Yamauchi; Youngjoo Chung; Kentaro Nakamura; Yunjiang Rao, Editor(s)

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