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Proceedings Paper

Influence of alignment error and random noise on interferometry flat sub-aperture stitching
Author(s): Wantao Deng; Kaiwei Wang; Jinchun Zhang
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Paper Abstract

In the flat sub-aperture stitching test, the dominant e error comes from two dimensional translation stage that carries the flat under test, which contains tilt and position error i.e., the alignment error. In order to analyze the influence of alignment error on stitching precision, we use Zemax optical software to simulate a system to detect the phase of each sub-aperture of measured flat and add tilt and position errors and random noise to sub-apertures. The simulation model was utilized in this paper to evaluate the mechanical precision of the translation stage in order to meet a required stitching precision of 1/1000λ.

Paper Details

Date Published: 15 October 2012
PDF: 6 pages
Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 841715 (15 October 2012); doi: 10.1117/12.966324
Show Author Affiliations
Wantao Deng, Zhejiang Univ. (China)
Kaiwei Wang, Zhejiang Univ. (China)
Jinchun Zhang, Zhejiang Univ. (China)


Published in SPIE Proceedings Vol. 8417:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Libin Xiang; Sandy To, Editor(s)

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