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Proceedings Paper

Investigation On The Second Optical Inspection Of ICs
Author(s): G. Schreurs; E. Bellon; M. Vercruyssen; A . Oosterlinck
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Paper Abstract

This paper presents a study on the automatic second optical inspection of ICs. The emphasis lays on the image processing algorithms. A distinction is made between "primary feature inspection" and "morphologic feature inspection". Both reference and non-reference methods are considered. In each case, inspection in one pass is possible. Some results are given and discussed.

Paper Details

Date Published: 19 December 1985
PDF: 8 pages
Proc. SPIE 0557, Automatic Inspection and Measurement, (19 December 1985); doi: 10.1117/12.966268
Show Author Affiliations
G. Schreurs, University of Leuven (Belgium)
E. Bellon, University of Leuven (Belgium)
M. Vercruyssen, University of Leuven (Belgium)
A . Oosterlinck, University of Leuven (Belgium)


Published in SPIE Proceedings Vol. 0557:
Automatic Inspection and Measurement
Richard A. Brook; Michael J. W. Chen, Editor(s)

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