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Proceedings Paper

A Digital Wafer Image and Geometry Processor
Author(s): George Huang; Dann Wang; Edward Huang; Chien Huang
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Paper Abstract

I. Introduction: Digital image inspection and measurement systems, in recent years, have made significant progress toward small size, light weight, and low cost, as computer technology and specialized processing hardware have made rapid advances. This paper is a report of a developmental effort on an image processor based on IBM PC XT/AT for semiconductor manufacturing industry where extensive inspection and measurement take place [1-3].

Paper Details

Date Published: 19 December 1985
PDF: 6 pages
Proc. SPIE 0557, Automatic Inspection and Measurement, (19 December 1985); doi: 10.1117/12.966260
Show Author Affiliations
George Huang, Vision Incorporated (United States)
Dann Wang, Vision Incorporated (United States)
Edward Huang, Vision Incorporated (United States)
Chien Huang, Vision Incorporated (United States)


Published in SPIE Proceedings Vol. 0557:
Automatic Inspection and Measurement
Richard A. Brook; Michael J. W. Chen, Editor(s)

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