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Proceedings Paper

Soft X-Ray Optics Using Metal Multilayer Mirrors
Author(s): Ping Lee
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Paper Abstract

Recent advances in thin film fabrication techniques have made metal multilayer mirrors an important new addition in the field of soft x-ray diffraction optics. A metal multilayer is one dimensional periodic structure which consists of an alternating sequence of high/low atomic number elements evaporated or sputtered onto a substrate. Characterization of these devices have been carried out on a variety of x-ray sources, including synchrotron radiation, over a large range of parameters. Extensive modelling of the diffraction characteristics of multilayers has shown that the theory of optics of thin film gives good agreement between measured and calculated diffraction profiles. Application of metal multilayer mirrors as normal incidence x-ray collectors, monochromators and beam splitters is being explored.

Paper Details

Date Published: 23 May 1984
PDF: 7 pages
Proc. SPIE 0464, Solid-State Optical Control Devices, (23 May 1984); doi: 10.1117/12.966229
Show Author Affiliations
Ping Lee, Ball Aerospace Systems Division (United States)

Published in SPIE Proceedings Vol. 0464:
Solid-State Optical Control Devices
Pochi Yeh, Editor(s)

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