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Proceedings Paper

Scattering From High Efficiency Diffraction Gratings
Author(s): G. J. Dunning; M. L. Minden
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Paper Abstract

Scatter from high efficiency, reflective diffraction gratings has been characterized. Three major types of scatter are identified: (1) random, which occurs over 27 s.r., (2) band or ghost scatter which occurs in the plane of incidence and (3) structured scatter which is a symmetrical pattern repeated about each order. Measurements were taken at 10.6 pm on gratings made by ruling, ion-etching, holography, or a combination of these techniques. We have found that the characteristic scatter from these high efficiency gratings depends strongly on the way the gratings are fabricated.

Paper Details

Date Published: 10 February 1981
PDF: 6 pages
Proc. SPIE 0240, Periodic Structures, Gratings, Moire Patterns, and Diffraction Phenomena I, (10 February 1981); doi: 10.1117/12.965662
Show Author Affiliations
G. J. Dunning, Hughes Research Laboratories (United States)
M. L. Minden, Hughes Research Laboratories (United States)


Published in SPIE Proceedings Vol. 0240:
Periodic Structures, Gratings, Moire Patterns, and Diffraction Phenomena I
C. H. Chi; E. G. Loewen; C. L. O'Bryan III, Editor(s)

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