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Proceedings Paper

Vacuum Ultraviolet Gratings
Author(s): Bernhard W. Bach
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Paper Abstract

Grating efficiencies in the vacuum ultraviolet have historically ranged up to 42% absolute on plane gratings overcoated with AIMgF2 for 1216A. This has been primarily achieved with spacings of 1200 1/mm to 3600 1/mm at blaze angles of 4° and greater. Gratings with less than 1200 1/mm at blaze angles of 2° and below have shown to reflect 10 to 30%. Gratings finer than 360C 1/mm were, (until now), only available when holographically produced. A better understanding of the factors limiting groove smoothness has made it possible to rule improved diffraction gratings for the vacuum ultraviolet. At 200 1/mm we have achieved absolute efficiency of 63% @ 1216A and with 6000 1/mm, 33 to 35% @ 1216A. These improved efficiencies have been possible on spherical and non spherical surfaces.

Paper Details

Date Published: 10 February 1981
PDF: 2 pages
Proc. SPIE 0240, Periodic Structures, Gratings, Moire Patterns, and Diffraction Phenomena I, (10 February 1981); doi: 10.1117/12.965658
Show Author Affiliations
Bernhard W. Bach, Hyperfine Inc. (United States)


Published in SPIE Proceedings Vol. 0240:
Periodic Structures, Gratings, Moire Patterns, and Diffraction Phenomena I
C. H. Chi; E. G. Loewen; C. L. O'Bryan III, Editor(s)

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