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Proceedings Paper

Grating Profile Reconstruction
Author(s): Andre Roger
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Paper Abstract

A simple low-cost non destructive method has been developed for reconstructing grating profiles. It is based on an inverse scattering, electromagnetic rigorous theory. A computer program has been written for metallic gratings. It makes use of an efficiency curve in a constant deviation mounting and in TE polarization, and reconstitutes the grating profile. Thus the implementation of the reconstruction requires only optical measurements which can be easily performed and do not damage the grating surface. The program has been tested both on numerically simulated data and on actual physical measures, and gives good results.

Paper Details

Date Published: 10 February 1981
PDF: 5 pages
Proc. SPIE 0240, Periodic Structures, Gratings, Moire Patterns, and Diffraction Phenomena I, (10 February 1981); doi: 10.1117/12.965641
Show Author Affiliations
Andre Roger, Laboratoire d'Optique Electromagnetique (France)

Published in SPIE Proceedings Vol. 0240:
Periodic Structures, Gratings, Moire Patterns, and Diffraction Phenomena I
C. H. Chi; E. G. Loewen; C. L. O'Bryan III, Editor(s)

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