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Proceedings Paper

Ion-Etched Gratings For Laser Applications
Author(s): Hugh L. Garvin; Anson Au; Monica L. Minden
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Paper Abstract

Ion beam sputter etching has proven to be a superior technique for producing grating sampling mirrors for large optical systems. The patterns to be etched are defined by a photoresist masking film on the mirror surface. Grating patterns have been produced on laser mirrors by replication of diamond-scribed master patterns, while holographic construction has been used to produce linear and nonlinear gratings. The microscopic details of ion etched grating profiles show that the process is capable of high resolution pattern delineation and large area device fabrication.

Paper Details

Date Published: 10 February 1981
PDF: 6 pages
Proc. SPIE 0240, Periodic Structures, Gratings, Moire Patterns, and Diffraction Phenomena I, (10 February 1981); doi: 10.1117/12.965636
Show Author Affiliations
Hugh L. Garvin, Hughes Research Laboratories (United States)
Anson Au, Hughes Research Laboratories (United States)
Monica L. Minden, Hughes Research Laboratories (United States)

Published in SPIE Proceedings Vol. 0240:
Periodic Structures, Gratings, Moire Patterns, and Diffraction Phenomena I
C. H. Chi; E. G. Loewen; C. L. O'Bryan III, Editor(s)

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