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Proceedings Paper

Resistance Transitions Of Ion Beam Thinned YBa2Cu3O7 Films
Author(s): A. F. Hebard; T. Siegrist; E. Coleman; R. H. Eick
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Paper Abstract

Milling with Xenon ions directed at grazing angles onto the surfaces of c-axis oriented YBa2Cu3O7 films is shown to give smooth films which superconduct at thicknesses approaching a lattice constant. The observed linear dependence of the room temperature sheet conductance with milling time allows a determination of the effective electrical thickness after each milling stage. The resistance transitions of all films having a superconducting transition show a metallic behavior with a positive temperature coefficient of resistance. Degradation of superconducting properties becomes significant for films less than 100A thick although this degradation is appreciably less for films which initially (before milling) have sharp resistance transitions and a strong c-axis orientation. Reproducible and controlled fabrication of ultrathin films using this milling technique shows promise as an important step in the post-deposition processing of high- Tc thin films for electronic device applications.

Paper Details

Date Published: 19 March 1990
PDF: 8 pages
Proc. SPIE 1187, Processing of Films for High Tc Superconducting Electronics, (19 March 1990); doi: 10.1117/12.965171
Show Author Affiliations
A. F. Hebard, AT&T Bell Laboratories (United States)
T. Siegrist, AT&T Bell Laboratories (United States)
E. Coleman, AT&T Bell Laboratories (United States)
R. H. Eick, AT&T Bell Laboratories (United States)

Published in SPIE Proceedings Vol. 1187:
Processing of Films for High Tc Superconducting Electronics
T. Venkatesan, Editor(s)

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