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Proceedings Paper

Photoresponse Of Laser Modified High-Tc Superconducting Thin Films
Author(s): Robert R. Krchnavek; S. J. Allen; Siu-Wai Chan; F. De Rosa; M. K. Kelly; S. Sampere; C. T. Rogers; P. F. Miceli
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Paper Abstract

The discovery of high critical temperature (Tc) superconductors has spawned an extensive research effort to understand and apply these new materials. One potentially promising area is in microelectronics. High quality superconducting thin films on a variety of substrates have been demonstrated by several authors. However, useful application of these thin films requires subsequent processing to fabricate microelectronic structures. These structures can range from relatively simple superconducting lines for interconnects to as yet undiscovered electronic devices. In this paper, we present our work on the use of a focused laser beam to modify the transport properties of a superconducting thin film. By placing the film in a vacuum chamber and scanning a focused Ar+ laser beam normal to the surface, we can selectively remove oxygen from the film on a micron scale. The resulting transport properties reveal a reduced Tc and critical current density (Jc). By monitoring the room temperature electrical resistance, one can control the degree of oxygen removal which allows one to modify the film properties from metallic-like to semiconducting-like. This technique shows promise for forming device structures based upon a superconducting-semiconducting-superconducting geometry. Current progress towards the realization of a fast photodetector fabricated by this technique will be discussed.

Paper Details

Date Published: 19 March 1990
PDF: 9 pages
Proc. SPIE 1187, Processing of Films for High Tc Superconducting Electronics, (19 March 1990); doi: 10.1117/12.965166
Show Author Affiliations
Robert R. Krchnavek, Bellcore (United States)
S. J. Allen, Bellcore (United States)
Siu-Wai Chan, Bellcore (United States)
F. De Rosa, Bellcore (United States)
M. K. Kelly, Bellcore (United States)
S. Sampere, Bellcore (United States)
C. T. Rogers, Bellcore (United States)
P. F. Miceli, Bellcore (United States)

Published in SPIE Proceedings Vol. 1187:
Processing of Films for High Tc Superconducting Electronics
T. Venkatesan, Editor(s)

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