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Proceedings Paper

Y1Ba2Cu3O7-x Laser-Ablation Plume Dynamics Measurement By Nanosecond Response Ion Probe: Comparison With Optical Measurements.
Author(s): D. N. Mashburn; D. B. Geohegan
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Paper Abstract

A family of fast time response ion probes has been developed to study the laser-ablation plume dynamics under Y1Ba2Cu3O7-x film-growth conditions. These probes are useful over a wide range of pressures, distances, laser energies, and energy densities. The ion probe measurements are complemented and corroborated by measurements using spatially and temporally resolved optical emission and absorption spectroscopy. The results confirm a long lived ionized component to the plume and a marked slowing of the plasma front at film deposition pressures and distances. Both the ion probe and spectroscopic techniques show promise as sensitive process monitors for film deposition by laser ablation.

Paper Details

Date Published: 19 March 1990
PDF: 10 pages
Proc. SPIE 1187, Processing of Films for High Tc Superconducting Electronics, (19 March 1990); doi: 10.1117/12.965159
Show Author Affiliations
D. N. Mashburn, Oak Ridge National Laboratory (United States)
D. B. Geohegan, Oak Ridge National Laboratory (United States)


Published in SPIE Proceedings Vol. 1187:
Processing of Films for High Tc Superconducting Electronics
T. Venkatesan, Editor(s)

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