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Proceedings Paper

Physics Of In-Situ Laser Deposition Of Superconducting Thin Films
Author(s): H. S. Kwok; D. T. Shaw; Q. Y. Ying; J. P. Zheng; S. Witanachchi; E. Petrou; H. S. Kim
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Paper Abstract

The physics of the in-situ laser deposition process is reviewed. Emphasis will be placed on the use of excimer lasers, and the deposition of YBCO thin films. It will be shown that the laser target interaction conditions, and the properties of the laser generated plume are inducive to the formation of high quality films. In addition to the formation of energetic atomic beams, laser deposition is also highly compatible with reactive deposition which make it suitable for oxide and nitride films. An in-situ diagnostic technique is introduced which is capable of detecting the inter-facial boundary layer between the film and the substrate. It is also shown that post-deposition in-situ oxidation is necessary for the formation of superconducting films.

Paper Details

Date Published: 19 March 1990
PDF: 11 pages
Proc. SPIE 1187, Processing of Films for High Tc Superconducting Electronics, (19 March 1990); doi: 10.1117/12.965158
Show Author Affiliations
H. S. Kwok, State University of New York at Buffalo (United States)
D. T. Shaw, State University of New York at Buffalo (United States)
Q. Y. Ying, State University of New York at Buffalo (United States)
J. P. Zheng, State University of New York at Buffalo (United States)
S. Witanachchi, State University of New York at Buffalo (United States)
E. Petrou, State University of New York at Buffalo (United States)
H. S. Kim, State University of New York at Buffalo (United States)


Published in SPIE Proceedings Vol. 1187:
Processing of Films for High Tc Superconducting Electronics
T. Venkatesan, Editor(s)

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