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Proceedings Paper

High-Tc Superconducting Bi Based Thin Films Prepared By Layer Controlled Deposition
Author(s): Kentaro Setsune; Makoto Kitabatake; Tomoaki Matsushima; Yo Ichikawa; Hideaki Adachi; Kiyotaka Wasa
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Paper Abstract

High-Tc superconducting thin films of Bismuth layered perovskite were artificially prepared by reactive sequential deposition of Bi, SrCu, and CaCu using DC magnetron multitarget sputtering. This deposition technique achieves a selective growth for Bismuth system composed with four and five Cu-0 planes by controlling the deposition time of CaCu oxide and its input power. These were post annealed and it was made sure that thin films with five Cu-0 planes did not exhibit zero resistivity. In order to obtain the as-deposited superconducting thin films, intermittent deposition technique was investigated. The Details about this fabrication process were studied referring to superconducting properties and crystal structure.

Paper Details

Date Published: 19 March 1990
PDF: 10 pages
Proc. SPIE 1187, Processing of Films for High Tc Superconducting Electronics, (19 March 1990); doi: 10.1117/12.965144
Show Author Affiliations
Kentaro Setsune, Matsushita Electric Industrial Co. Ltd. (Japan)
Makoto Kitabatake, Matsushita Electric Industrial Co. Ltd. (Japan)
Tomoaki Matsushima, Matsushita Electric Industrial Co. Ltd. (Japan)
Yo Ichikawa, Matsushita Electric Industrial Co. Ltd. (Japan)
Hideaki Adachi, Matsushita Electric Industrial Co. Ltd. (Japan)
Kiyotaka Wasa, Matsushita Electric Industrial Co. Ltd. (Japan)


Published in SPIE Proceedings Vol. 1187:
Processing of Films for High Tc Superconducting Electronics
T. Venkatesan, Editor(s)

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