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Proceedings Paper

Study And Application Of Soft X-Ray Emission From Laser-Produced Plasmas
Author(s): M. Chaker; H. Pepin; V. Bareau; B. Lafontaine; I. Toubhans,; R. Fabbro; J. F. Currie
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Paper Abstract

Laser created X-ray sources have been investigated both theoretically and experimentally using X = 1.06 pi and X = 0.26 wm and short pulses (T = 0.5 nsec). We also report the first detailed X-ray measurements using a low energy commercially available KrF laser (τ = 25 nsec). The conversion efficiency is given for various target atomic numbers and a large range of laser intensities. Finally, we introduce lithographic considerations and examine the laser requirements for an X-ray lithography source acceptable for industrial applications.

Paper Details

Date Published: 4 February 1988
PDF: 6 pages
Proc. SPIE 0831, X-Rays from Laser Plasmas, (4 February 1988); doi: 10.1117/12.965043
Show Author Affiliations
M. Chaker, Universite du Quebec (Canada)
H. Pepin, Universite du Quebec (Canada)
V. Bareau, Universite du Quebec (Canada)
B. Lafontaine, Universite du Quebec (Canada)
I. Toubhans,, Laboratoire du CNRS (France)
R. Fabbro, Laboratoire du CNRS (France)
J. F. Currie, Ecole Polytechnique (Canada)


Published in SPIE Proceedings Vol. 0831:
X-Rays from Laser Plasmas
Martin C. Richardson, Editor(s)

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