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Proceedings Paper

Spatial Resolution And Absolute Wavelength Values Through 2D X-Ray Spectroscopy
Author(s): Benjamin S. Fraenkel; Zwi H. Kalman
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Paper Abstract

Double reflections in single crystals and in two crystals in series may be used to obtain monochromatic x-ray images of x-ray sources. Thus ion distributions of the various ions in laser produced plasmas and other hot plasmas may be obtained. Moreover, strictly monochromatic parallel beams of x-rays, produced with this method from e.g. a synchroton source, may he used for lithography, with the mask not necessarily in close contact with the photoresist. The beam will be parallel enough not to be broadened by the distance between them. Theory yields a spatial resolution of 100Å at 1.5 wavelength, with the distance between mask and photoresist of about 1 mm. Similar results with two crystals in series may be obtained, if the two planes of reflection, each containing the incoming and outgoing beam, are not parallel. The angular broadening of a monochromatic beam obtained by either method of double reflection is given as function of diffraction width of the second reflecting crystal plane and of the angle between the planes of reflection.

Paper Details

Date Published: 4 February 1988
PDF: 12 pages
Proc. SPIE 0831, X-Rays from Laser Plasmas, (4 February 1988); doi: 10.1117/12.965027
Show Author Affiliations
Benjamin S. Fraenkel, The Hebrew University (Israel)
Zwi H. Kalman, The Hebrew University (Israel)

Published in SPIE Proceedings Vol. 0831:
X-Rays from Laser Plasmas
Martin C. Richardson, Editor(s)

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