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Proceedings Paper

Characterisation And Optimisation Of A Laser Generated Plasma Source Of Soft X Rays For Biological Imaging And Soft X-Ray Lithography
Author(s): A. M. Rogoyski; P. Charalambous.; C. Hills; A. G. Michette
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Paper Abstract

Preliminary characterisation of a laser generated plasma source of soft x rays in the wavelength range of approximately 40 to 60 A has been undertaken using a Nd:YAG laser emitting 0.5 J at a wavelength of 1.064 itm radiation in 8 ns pulses at 20 Hz repetition rate. The effects upon x-ray production of moving the target through focus and the consequences of target cratering have been investigated. Results from these experiments have been used for preliminary optimisation of the process of contact replication of test specimens, resulting in the replication of feature sizes of 700 Å.

Paper Details

Date Published: 4 February 1988
PDF: 7 pages
Proc. SPIE 0831, X-Rays from Laser Plasmas, (4 February 1988); doi: 10.1117/12.965022
Show Author Affiliations
A. M. Rogoyski, Kings College (England)
P. Charalambous., Kings College (England)
C. Hills, Kings College (England)
A. G. Michette, Kings College (England)

Published in SPIE Proceedings Vol. 0831:
X-Rays from Laser Plasmas
Martin C. Richardson, Editor(s)

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