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Proceedings Paper

Soft X-Ray Imaging using CCD Sensors
Author(s): Werner Meyer-Ilse
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Paper Abstract

An imaging CCD (charge coupled device) camera system for soft x-ray detection has been constructed. A reasonable efficiency is achieved down to photon energies of 270 eV. The performance of a system applying a CCD is compared with other detection techniques, and the different ways to increase the performance of x-ray imaging with CCD's are discussed.

Paper Details

Date Published: 1 January 1986
PDF: 4 pages
Proc. SPIE 0733, Soft X-Ray Optics and Technology, (1 January 1986); doi: 10.1117/12.964955
Show Author Affiliations
Werner Meyer-Ilse, Universitat Gottingen (Germany)


Published in SPIE Proceedings Vol. 0733:
Soft X-Ray Optics and Technology
E. Koch; Guenther A. Schmahl, Editor(s)

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