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Proceedings Paper

Spectroscopic Ellipsometry with Synchrotron Radiation: Latest Developments
Author(s): J. Barth; R. L. Johnson; S. Logothetidis; M. Cardona; D. Fuchs; A. M. Bradshaw
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Paper Abstract

This paper describes a project to perform spectroscopic ellipsometry in the VUV and soft x-ray spectral range using synchrotron radiation.

Paper Details

Date Published: 1 January 1986
PDF: 7 pages
Proc. SPIE 0733, Soft X-Ray Optics and Technology, (1 January 1986); doi: 10.1117/12.964920
Show Author Affiliations
J. Barth, Max-Planck-Institut fur Festkorperforschung (West-Germany)
R. L. Johnson, Max-Planck-Institut fur Festkorperforschung (West-Germany)
S. Logothetidis, Max-Planck-Institut fur Festkorperforschung (West-Germany)
M. Cardona, Max-Planck-Institut fur Festkorperforschung (West-Germany)
D. Fuchs, Fritz-Haber-Institut der Max-Planck-Gesellschaft (West-Germany)
A. M. Bradshaw, Fritz-Haber-Institut der Max-Planck-Gesellschaft (West-Germany)


Published in SPIE Proceedings Vol. 0733:
Soft X-Ray Optics and Technology
E. Koch; Guenther A. Schmahl, Editor(s)

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