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Proceedings Paper

Analytical Model For Determining Temperature Transients In Multilayer Thin Films With Uncooled And Cooled Soft X-Ray Optics
Author(s): J. R. Palmer
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Paper Abstract

This paper describes the temperature gradients in multilayer optical thin films when subjected to soft x-rays. Equations are described for use in evaluating the time-temperature history of each coating interface and subsequent energy distribution to the substrate. One and three dimensional equations are provided to examine the impact of thermal diffusivity, relaxation time, and subsequent temperature rise in the optical thin films. Coatings that are supported by cooled substrates are evaluated as a function of substrate material and cooling medium heat transfer coefficient. Coating temperatures and substrate temperatures are evaluated for conditions satisfying the semi-infinite plate model.

Paper Details

Date Published: 1 January 1986
PDF: 13 pages
Proc. SPIE 0733, Soft X-Ray Optics and Technology, (1 January 1986); doi: 10.1117/12.964907
Show Author Affiliations
J. R. Palmer, COMARCO, INC. (United States)


Published in SPIE Proceedings Vol. 0733:
Soft X-Ray Optics and Technology
E. Koch; Guenther A. Schmahl, Editor(s)

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