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Proceedings Paper

Characterization of Multilayer Structures for Soft X-ray Dispersion
Author(s): J. V. Gilfrich; D. B. Brown; D. Rosen
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Paper Abstract

The use of multilayer structures for soft x-ray spectroscopy requires an accurate knowledge of their reflection properties. In this paper, measurements and calculations will be presented for the single crystal integral reflection coefficients of several multilayer structures. Experimental results will be presented for wavelengths from about 0.8 to 1.4 nm. The measured integral reflection coefficients were smaller than those calculated for a perfect multilayer structure, in agreement with previous results. This reduction of diffraction efficiency is due to imperfections in the multilayer structure. Introduction of appropriate defect structure into the computational methods will be discussed. Evidence will be presented that the effect of substrate roughness is dominant.

Paper Details

Date Published: 9 April 1987
PDF: 7 pages
Proc. SPIE 0688, Multilayer Structures & Laboratory X-Ray Laser Research, (9 April 1987); doi: 10.1117/12.964831
Show Author Affiliations
J. V. Gilfrich, Naval Research Laboratory (United States)
D. B. Brown, Naval Research Laboratory (United States)
D. Rosen, Sachs/Freeman Associates, Inc. (United States)

Published in SPIE Proceedings Vol. 0688:
Multilayer Structures & Laboratory X-Ray Laser Research
Natale M. Ceglio; Pierre Dhez, Editor(s)

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