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Proceedings Paper

Multilayer Reflectors for the 200 A Region
Author(s): Felix E. Fernandez; Charles M. Falco
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Paper Abstract

Silicon/tungsten multilayer normal-incidence mirrors with maximum reflectance at 212 Å have been designed and studied. Details of the fabrication and characterization techniques are given. Preliminary results of synchrotron measurements show agreement with calculations based on microscopic structure of these multilayers. The Si/W combination has desirable characteristics for use in X-UV or soft x-ray devices.

Paper Details

Date Published: 9 April 1987
PDF: 6 pages
Proc. SPIE 0688, Multilayer Structures & Laboratory X-Ray Laser Research, (9 April 1987); doi: 10.1117/12.964829
Show Author Affiliations
Felix E. Fernandez, University of Arizona (United States)
Charles M. Falco, University of Arizona (United States)


Published in SPIE Proceedings Vol. 0688:
Multilayer Structures & Laboratory X-Ray Laser Research
Natale M. Ceglio; Pierre Dhez, Editor(s)

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