
Proceedings Paper
The first fabricated dual-band uncooled infrared microbolometer detector with a tunable micro-mirror structureFormat | Member Price | Non-Member Price |
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Paper Abstract
This paper presents the first fabricated dual-band uncooled resistive infrared thermal microbolometer implemented with
a resistive microbolometer and a tunable micro-mirror structure. Tunable reflective micro-mirrors are suspended
underneath the suspended resistive microbolometers having a 35 μm pixel pitch, and they are switched between two
positions by the application of an electrostatic force for obtaining different responses in two wavelength infrared
atmospheric windows, namely the 3-5 and 8-14 μm, by tuning the optical tunable resonant cavity. This approach allows
assessing the actual temperature of the viewed scene by comparing the responses of the detector in these two wavelength
infrared atmospheric windows. The absorption coefficients of the detector are simulated by using the Cascaded
Transmission Line (CTL) model, and the sacrificial layer thicknesses are optimized to obtain maximum absorption from
these two wavelength regions. The absorption coefficients obtained from the measurements are in correspondence with
the simulations. The responsivity measurements results shows that the absorption is decreased in an amount of 17.9 %
in the 3-5 μm spectral band, while the absorption is increased in an amount of 8.5 % in the 8-14 μm spectral band,
depending on the micro-mirror position. These initial results are promising for the dual-band detection using uncooled
infrared microbolometer detectors.
Paper Details
Date Published: 31 May 2012
PDF: 11 pages
Proc. SPIE 8353, Infrared Technology and Applications XXXVIII, 83531C (31 May 2012); doi: 10.1117/12.964551
Published in SPIE Proceedings Vol. 8353:
Infrared Technology and Applications XXXVIII
Bjørn F. Andresen; Gabor F. Fulop; Paul R. Norton, Editor(s)
PDF: 11 pages
Proc. SPIE 8353, Infrared Technology and Applications XXXVIII, 83531C (31 May 2012); doi: 10.1117/12.964551
Show Author Affiliations
Selcuk Keskin, Middle East Technical Univ. (Turkey)
Tayfun Akin, Middle East Technical Univ. (Turkey)
Published in SPIE Proceedings Vol. 8353:
Infrared Technology and Applications XXXVIII
Bjørn F. Andresen; Gabor F. Fulop; Paul R. Norton, Editor(s)
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