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Proceedings Paper

Statistical And Signal Processing Concepts In Surface Metrology
Author(s): E L Church; P. Z. Takacs
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Paper Abstract

This paper proposes the use of a simple two-scale model of surface roughness for testing and specifying the topographic figure and finish of synchrotron-radiation mirrors. In this approach the effects of figure and finish are described in terms of their slope distribution and per spectrum, respectively, which are then combined with the system point spread function to produce a composite image. The result can be used to predict mirror performance or to translate design requirements into manufacturing specifications. Pacing problems in this approach are the development of a practical long-trace slope-profiling instrument and realistic statistical models for figure and finish errors.

Paper Details

Date Published: 3 November 1986
PDF: 9 pages
Proc. SPIE 0645, Optical Manufacturing, Testing and Aspheric Optics, (3 November 1986); doi: 10.1117/12.964495
Show Author Affiliations
E L Church, USA ARDEC (United States)
P. Z. Takacs, Brookhaven National Laboratory (United States)

Published in SPIE Proceedings Vol. 0645:
Optical Manufacturing, Testing and Aspheric Optics
Gregory M. Sanger, Editor(s)

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