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Proceedings Paper

In Process Measurement Of Radii Of Curvature On Micromachined Spherical Zones
Author(s): P. Langenbeck
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Paper Abstract

Measurement of radii of curvature (cv, cc) in the 'ange 1 to 30 m is hardly possible using available metrology equipment. An ancient method' of long radius measurement is reevaluated and adapted to in situ measurments on spherical generators . Finding the auto-collimation position is eased by strioscopic interferometry which at the same time allows Foucault- and interferometric surface testing. Radii typical in high power lasers from 1 - 30 m are subject to this type of radius measurement. The inaccuracy is in the order of dR/R = 0,05 %.

Paper Details

Date Published: 3 November 1986
PDF: 4 pages
Proc. SPIE 0645, Optical Manufacturing, Testing and Aspheric Optics, (3 November 1986); doi: 10.1117/12.964482
Show Author Affiliations
P. Langenbeck

Published in SPIE Proceedings Vol. 0645:
Optical Manufacturing, Testing and Aspheric Optics
Gregory M. Sanger, Editor(s)

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