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Proceedings Paper

Two-dimensional structural surface measurement based on spectrally resolved white-light interferometry
Author(s): Wantao Deng; Kaiwei Wang; Jinchun Zhang
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Paper Abstract

By analyzing the spectral domain’s phase information, the spectrally resolved white-light interferometry (SRWLI) is capable of obtaining the profile with a single frame of interferogram. However, only one-dimensional (1-D) surfaces can be tested with this technique, otherwise the interference patterns under adjacent wavelengths would overlap each other, which would make the whole interferogram hard to identify. We present here a 2-D SRWLI method which can be applied to measure narrow rectangle areas. Frequency comb is produced by means of using a F-P etalon to filter the broadband source. With the filtered frequency comb illumination, the interference patterns under adjacent wavelengths would be separated by a little distance, which enables us to obtain a 2-D profile with a small width. The experimental details of measurement of a step sample are discussed in this paper.

Paper Details

Date Published: 15 October 2012
PDF: 6 pages
Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 84170F (15 October 2012); doi: 10.1117/12.964378
Show Author Affiliations
Wantao Deng, Zhejiang Univ. (China)
Kaiwei Wang, Zhejiang Univ. (China)
Jinchun Zhang, Zhejiang Univ. (China)


Published in SPIE Proceedings Vol. 8417:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Libin Xiang; Sandy To, Editor(s)

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