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Proceedings Paper

High-Resolution Angle-Resolved X-Ray Scattering From Mirrors And Multilayers
Author(s): Tetsuya Ishikawa; Tadashi Matsushita; Atsuo Iida
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Paper Abstract

Angle resolved X-ray scattering was measured from flat mirrors and synthetic wultilayers using crystal collimator and analyzer with a resolution of 4 arc sec at 1.54 A. The scattering a few hundreds arc sec below and above the specular reflection from the mirror was intepreted to arise from the slope errors of the surface. Strong correlations between the angular broadening of the Bragg-diffracted beam from the multilayer and the surface quality of the substrate suggested that the multilayer mimics the slope distribution of the substrate.

Paper Details

Date Published: 21 October 1986
PDF: 6 pages
Proc. SPIE 0640, Grazing Incidence Optics, (21 October 1986); doi: 10.1117/12.964372
Show Author Affiliations
Tetsuya Ishikawa, National Laboratory for High Energy Physics (Japan)
Tadashi Matsushita, National Laboratory for High Energy Physics (Japan)
Atsuo Iida, National Laboratory for High Energy Physics (Japan)


Published in SPIE Proceedings Vol. 0640:
Grazing Incidence Optics
John F. Osantowski; Leon P. Van Speybroeck, Editor(s)

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