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Proceedings Paper

Survey Of Surface Roughness Properties Of Synchrotron Radiation Optics
Author(s): Peter Z. Takacs; Jeffrey Colbert; Eugene L. Church
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Paper Abstract

Measurements of surface roughness were made on a large number of grazing incidence mirrors delivered for use at the National Synchrotron Light Source (NSLS) at Brookhaven National Laboratory. The measurements were made with a WYKO optical profiler using a 2.5X and a 10X objective and analyzed with our PROFILE code to generate an average periodogram representation for each surface. The data is presented in the form of representative profiles with all of the periodogram curves arranged according to figure type. Analysis of the periodograms allows one to compute bandwidth-limited values for RMS roughness and slope, to provide valuable feedback information to manufacturers regarding compliance with specifications, and to predict the performance of the optic at x-ray wavelengths.

Paper Details

Date Published: 21 October 1986
PDF: 12 pages
Proc. SPIE 0640, Grazing Incidence Optics, (21 October 1986); doi: 10.1117/12.964357
Show Author Affiliations
Peter Z. Takacs, Brookhaven National Laboratory (United States)
Jeffrey Colbert, Brookhaven National Laboratory (United States)
Eugene L. Church, Brookhaven National Laboratory (United States)


Published in SPIE Proceedings Vol. 0640:
Grazing Incidence Optics
John F. Osantowski; Leon P. Van Speybroeck, Editor(s)

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