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Proceedings Paper

Surface Characterization Of Grazing-Incidence Optics In The Extreme Ultraviolet And X-Ray Regions
Author(s): Jean M. Bennett
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Paper Abstract

Roughness and waviness on mirrors for use in grazing-incidence optical systems intended for the extreme ultraviolet and x-ray regions affect both the focusing properties of the mirrors and the scattered light they produce. The most important surface spatial wave-lengths of the roughness are in the 1- to 100-μm range and are easily measurable using conventional optical and mechanical techniques. Descriptions of some of these techniques will be given along with examples of measurements made on very smooth polished optical surfaces that are comparable to those used as grazing-incidence optics.

Paper Details

Date Published: 21 October 1986
PDF: 7 pages
Proc. SPIE 0640, Grazing Incidence Optics, (21 October 1986); doi: 10.1117/12.964356
Show Author Affiliations
Jean M. Bennett, University of Alabama in Huntsville (United States)

Published in SPIE Proceedings Vol. 0640:
Grazing Incidence Optics
John F. Osantowski; Leon P. Van Speybroeck, Editor(s)

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