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Proceedings Paper

Laser-Induced Chemical Vapor Deposition of High-Purity Metals
Author(s): Thomas H. Baum
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Paper Abstract

The laser chemical vapor deposition (LCVD) of aluminum and gold has been achieved via pyrolytic decomposition of trimethylamine aluminum hydride and dimethylgold (p-diketonates), respectively. The rates of metal deposition, the purity of the deposited metals and the electrical properties of the deposits are a direct result of the chemical and physical properties of the precursor and the metal.

Paper Details

Date Published: 23 February 1990
PDF: 11 pages
Proc. SPIE 1190, Laser/Optical Processing of Electronic Materials, (23 February 1990); doi: 10.1117/12.963992
Show Author Affiliations
Thomas H. Baum, IBM Almaden Research Center (United States)

Published in SPIE Proceedings Vol. 1190:
Laser/Optical Processing of Electronic Materials
Jagdish Narayan, Editor(s)

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