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Proceedings Paper

Rapid Thermal Multiprocessing For Micro Factories
Author(s): Krishna C. Saraswat; Len Booth; David D. Grossman; B. T. Khuri-Yakub; Yong Jin Lee; Mehrdad M. Moslehi; Samuel Wood
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Paper Abstract

Future success in microelectronics will demand rapid innovation, rapid product introduction and ability to react to a change in technological and business climate quickly. These technological advances in integrated electronics will require development of flexible manufacturing technology for VLSI systems. However, the current approach of establishing megafactories for mass manufacturing of chips will lead to a skyrocketing cost of more than 1 billion dollars to establish a factory by the end of this century. This could result in serious attrition of chip manufacturers. We propose new concepts of a programmable micro factory which may be characterized by more economical small scale production, higher flexibility to accommodate many products on several processes, and faster turnaround and learning. In-situ multi-processing equipment where several process steps can be done in sequence may be a key ingredient in this approach. For this environment to be flexible, the equipment must have ability to change processing environment, requiring extensive in-situ measurements and real time control. In-process and end-of-process measurements coupled with rapid learning through expert systems will facilitate faster innovation and better ability to react to a change.

Paper Details

Date Published: 6 April 1990
PDF: 13 pages
Proc. SPIE 1189, Rapid Isothermal Processing, (6 April 1990); doi: 10.1117/12.963953
Show Author Affiliations
Krishna C. Saraswat, Stanford University (United States)
Len Booth, Stanford University (United States)
David D. Grossman, Stanford University (United States)
B. T. Khuri-Yakub, Stanford University (United States)
Yong Jin Lee, Stanford University (United States)
Mehrdad M. Moslehi, Stanford University (United States)
Samuel Wood, Stanford University (United States)

Published in SPIE Proceedings Vol. 1189:
Rapid Isothermal Processing
Rajendra Singh, Editor(s)

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