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Proceedings Paper

AEMPES: An Expert System For In-Situ Diagnostics And Process Monitoring
Author(s): Su-sing Chen
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Paper Abstract

The logical architecture of an expert system AEMPES (Advanced Electronic Materials Processing Expert System) for in-situ diagnostics and process monitoring of advanced electronic materials processing is described. It is a distributed AI system with both the end-process and in-process diagnostics and monitoring capabilities. Techniques of sensor fusion, spatial reasoning, machine learning, reasoning with uncertainty and model-based reasoning are employed in the system.

Paper Details

Date Published: 15 February 1990
PDF: 10 pages
Proc. SPIE 1188, Multichamber and In-Situ Processing of Electronic Materials, (15 February 1990); doi: 10.1117/12.963949
Show Author Affiliations
Su-sing Chen, University of North Carolina (United States)


Published in SPIE Proceedings Vol. 1188:
Multichamber and In-Situ Processing of Electronic Materials
Robert S. Freund, Editor(s)

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