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Proceedings Paper

Multichamber And In-Situ Processing System Design And Control
Author(s): Su-shing Chen
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Paper Abstract

For multichamber and in-situ processing of microelectronic materials, there are few hundred steps in a manufacturing line. The design of such processing systems require careful simulation, modeling, and planning. Our basic approach is the idea of an interactive software design environment for equipment, process, and manufacturing line modeling and simulation, which provides a way to integrate the manufacturing line and its simulator tightly.

Paper Details

Date Published: 15 February 1990
PDF: 13 pages
Proc. SPIE 1188, Multichamber and In-Situ Processing of Electronic Materials, (15 February 1990); doi: 10.1117/12.963934
Show Author Affiliations
Su-shing Chen, University of North Carolina-Charlotte (United States)


Published in SPIE Proceedings Vol. 1188:
Multichamber and In-Situ Processing of Electronic Materials
Robert S. Freund, Editor(s)

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