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Proceedings Paper

Vision Based Instrumentation For Microelectronic Materials Processing
Author(s): Don W. Lake
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Paper Abstract

Proper instrumentation, documentation, and analysis are crucial to the continued advance of micro-electronic materials science. Many important phenomenon are visible. Many of those are progressive events that need observation throughout their transitory period. Microelectronics scientists and engineers have long required optical systems tools which properly handle visible phenomena. An optical based system, called a high-resolution Still/Video system, to fulfill crucial microelec-tronic needs is available. Microelectronic dimensions require the highest possible resolution to resolve the small details. The system provides 1134 by 486 pixel video frames. The transient nature of many events requires video and the associated capability of video recording. The system stores over 14,000 high-resolution video frames on a single standard commercial VHS tape. The widespread use of microscopy requires the ability to operate with a variety of optical microscopes. The system is directly compatible with most microscopes. In addition, analysis requires the ability to produce film and computer processed results of all crucial images. The system has both a companion film printer and a direct computer interface.

Paper Details

Date Published: 5 February 1990
PDF: 6 pages
Proc. SPIE 1186, Surface and Interface Analysis of Microelectronic Materials Processing and Growth, (5 February 1990); doi: 10.1117/12.963917
Show Author Affiliations
Don W. Lake, EG&G Reticon (United States)


Published in SPIE Proceedings Vol. 1186:
Surface and Interface Analysis of Microelectronic Materials Processing and Growth
Leonard J. Brillson; Fred H. Pollak, Editor(s)

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