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Proceedings Paper

A 10:1 Photomask Reduction Camera
Author(s): Katalin Voros; Pantas Sutardja; William G. Oldham
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Paper Abstract

To make high quality reticles for 1:1 projection steppers a new 10:1 reduction camera had been designed and built. Components of the camera, the illuminator and controller are described and operating conditions to print patterns of 0.75 μm lines and spaces are established. Optical and mechanical characterization results are presented.

Paper Details

Date Published: 20 August 1986
PDF: 6 pages
Proc. SPIE 0633, Optical Microlithography V, (20 August 1986); doi: 10.1117/12.963734
Show Author Affiliations
Katalin Voros, University of California (United States)
Pantas Sutardja, University of California (United States)
William G. Oldham, University of California (United States)

Published in SPIE Proceedings Vol. 0633:
Optical Microlithography V
Harry L. Stover, Editor(s)

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