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Proceedings Paper

Detecting Straight Edge In General Partially Coherent Cases
Author(s): Jian Yang; Shudong Wu; Zhijiang Wang
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Paper Abstract

On the basis of the partially coherent theory of light, an edge-threshold equation was deduced. The main point is an introduced new parameter, which shows the effect of the coherence and aberration of measuring system to edge detection. Curves of the new parameter vs coherence parameter of the microscope which is free of aberration are displayed in the paper.

Paper Details

Date Published: 20 August 1986
PDF: 4 pages
Proc. SPIE 0633, Optical Microlithography V, (20 August 1986); doi: 10.1117/12.963725
Show Author Affiliations
Jian Yang, Shanghai Institute of Optics and Fine Mechanics (China)
Shudong Wu, Shanghai Institute of Optics and Fine Mechanics (China)
Zhijiang Wang, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 0633:
Optical Microlithography V
Harry L. Stover, Editor(s)

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