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Proceedings Paper

A Simple, Compact, High Brightness Source For X-Ray Lithography And X-Ray Radiography
Author(s): Andrew M. Hawryluk
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Paper Abstract

A simple, compact, high brightness x-ray source has recently been built. This source utilizes a commercially available, cylindrical geometry electron beam evaporator, which has been modified to enhance the thermal cooling to the anode. Cooling is accomplished by using standard, low-conductivity laboratory water, with an inlet pressure of less than 50 psi, and a flow rate of approximately 0.3 gal./min. The anode is an inverted cone geometry for efficient cooling. The x-ray source has a measured sub-millimeter spot size (FWHM). The anode has been operated at 1 KW e-beam power (10 KV, 100 ma). Higher operating levels will be investigated. A variety of different x-ray lines can be obtained by the simple interchange of anodes of different materials. Typical anodes are made from easily machined metals, or materials which are vacuum deposited onto a copper anode. Typically, a few microns of material are sufficient to stop 10 KV electrons without significantly decreasing the thermal conductivity through the anode. The small size and high brightness of this source make it useful for step and repeat exposures over several square centimeter areas, especially in a research laboratory environment. For an aluminum anode, the estimated Al-K x-ray flux at 10 cms. from the source is 70 μW/cm2.

Paper Details

Date Published: 30 June 1986
PDF: 8 pages
Proc. SPIE 0632, Electron-Beam, X-Ray, and Ion-Beam Technology for Submicrometer Lithographies V, (30 June 1986); doi: 10.1117/12.963693
Show Author Affiliations
Andrew M. Hawryluk, Lawrence Livermore National Laboratory (United States)


Published in SPIE Proceedings Vol. 0632:
Electron-Beam, X-Ray, and Ion-Beam Technology for Submicrometer Lithographies V
Phillip D. Blais, Editor(s)

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