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Proceedings Paper

Polydimethylglutarimide (PMGI) Resist - A Progress Report
Author(s): A W. McCullough; D. A. Vidusek; M. W. Legenza; M. de Grandpre; J. Imhof
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Paper Abstract

PMGI is a recently developed polymer which has features that make it of interest to the semiconductor industry. Some recent work and applications of this polymer are presented. Emphasis is placed on incremental results and on the achievement of consistency in the behavior of the polymer. The material is currently under evaluation at a number of different sites.

Paper Details

Date Published: 9 July 1986
PDF: 5 pages
Proc. SPIE 0631, Advances in Resist Technology and Processing III, (9 July 1986); doi: 10.1117/12.963658
Show Author Affiliations
A W. McCullough, Shipley Company Inc. (United States)
D. A. Vidusek, Shipley Company Inc. (United States)
M. W. Legenza, Shipley Company Inc. (United States)
M. de Grandpre, Rohm and Haas Company (United States)
J. Imhof, Rohm and Haas Company (United States)


Published in SPIE Proceedings Vol. 0631:
Advances in Resist Technology and Processing III
C. Grant Willson, Editor(s)

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