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Proceedings Paper

Nanosecond Proton And Helium Ion Pulse Radiolysis Studies On Polystyrene
Author(s): Seiichi Tagawa; Noriyuki Kouchi; Yasushi Aoki; Hiromi Shibata
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Paper Abstract

The interaction of ion beams with polystyrene has been studied by using product analysis and ion beam pulse radiolysis, which can directly observe reactive intermediates produced by high energy ion irraciation. The resisit sensitivity per unit absorption dose increases with increasing stopping power or LET (linear energy transfer). The interaction between excited states (and ionic species) produced by high density electronic excitation of ion beams increases with increasing stopping power or LET and high density electronic excitation was confirmed directly for the first time on the basis of ion beam pulse radiolysis data.

Paper Details

Date Published: 9 July 1986
PDF: 6 pages
Proc. SPIE 0631, Advances in Resist Technology and Processing III, (9 July 1986); doi: 10.1117/12.963621
Show Author Affiliations
Seiichi Tagawa, University of Tokyo (Japan)
Noriyuki Kouchi, University of Tokyo (Japan)
Yasushi Aoki, University of Tokyo (Japan)
Hiromi Shibata, University of Tokyo (Japan)

Published in SPIE Proceedings Vol. 0631:
Advances in Resist Technology and Processing III
C. Grant Willson, Editor(s)

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