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Proceedings Paper

The Digital Piezo Transducer
Author(s): P. D. Atherton; T. R. Hicks; R. C. Sidey; N. K. Reay
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Paper Abstract

The Digital Piezo Transducer (DPT) is a piezo electric actuator incorporating a capacitance micrometer as an integrated position sensor. This internal micrometer has a position-al resolution of much better than a nanometre and 10 hysteresis. The DPT is operated in a closed servo loop and is capable of sub-nanometre resolution, repeatability and stability. Its response time is 0.2 msecs and it has a maximum range of 50μm.

Paper Details

Date Published: 20 August 1986
PDF: 4 pages
Proc. SPIE 0628, Advanced Technology Optical Telescopes III, (20 August 1986); doi: 10.1117/12.963563
Show Author Affiliations
P. D. Atherton, Queensgate Instruments Ltd. (United Kingdom)
T. R. Hicks, Queensgate Instruments Ltd. (United Kingdom)
R. C. Sidey, Queensgate Instruments Ltd. (United Kingdom)
N. K. Reay, Imperial College of Science & Technology (United Kingdom)

Published in SPIE Proceedings Vol. 0628:
Advanced Technology Optical Telescopes III
Lawrence D. Barr, Editor(s)

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