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Proceedings Paper

Silicon-Etalon Fiber-Optic Temperature Sensor
Author(s): Glenn Beheim; Klaus Fritsch; Joseph M. Flatico; Massood Tabib Azar
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Paper Abstract

A temperature sensor is described which consists of a silicon etalon that is sputtered directly onto the end of an optical fiber. A two-layer protective cap structure is used to improve the sensor's long-term stability. The sensor's output is wavelength encoded to provide a high degree of immunity from cable and connector effects. This sensor is extremely compact and potentially inexpensive.

Paper Details

Date Published: 13 February 1990
PDF: 8 pages
Proc. SPIE 1169, Fiber Optic and Laser Sensors VII, (13 February 1990); doi: 10.1117/12.963069
Show Author Affiliations
Glenn Beheim, National Aeronautics and Space Administration (United States)
Klaus Fritsch, John Carroll University (United States)
Joseph M. Flatico, Case Western Reserve University (United States)
Massood Tabib Azar, Case Western Reserve University (United States)


Published in SPIE Proceedings Vol. 1169:
Fiber Optic and Laser Sensors VII
Ramon P. DePaula; Eric Udd, Editor(s)

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