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Proceedings Paper

Optical Excitation Of Silicon Microresonators Using An Analogue Noise Modulated Source
Author(s): L. M. Zhang; D. Uttamchandani; B. Culshaw
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Paper Abstract

An optical source, whose intensity is modulated by a band-limited analogue noise waveform, is used to generate transverse vibrations in a micromechanical silicon resonator. The vibrations are generated by a photothermal process in which optical energy is absorbed at the surface of the resonator thereby producing a thermal wave whose a.c. component causes a periodic expansion of the resonator. A pressure sensor incorporating a micromechanical resonator sensor has been fabricated, and the pressure sensitivity of this device, when driven by the band limited noise source, is reported.

Paper Details

Date Published: 13 February 1990
PDF: 6 pages
Proc. SPIE 1169, Fiber Optic and Laser Sensors VII, (13 February 1990); doi: 10.1117/12.963023
Show Author Affiliations
L. M. Zhang, University of Strathclyde (United Kingdom)
D. Uttamchandani, University of Strathclyde (United Kingdom)
B. Culshaw, University of Strathclyde (United Kingdom)

Published in SPIE Proceedings Vol. 1169:
Fiber Optic and Laser Sensors VII
Ramon P. DePaula; Eric Udd, Editor(s)

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