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Proceedings Paper

Comparison Between Classical And Ion-Assisted Deposition On ZrO2 Layer For Optical Coating
Author(s): Gao Yang; Zhou Pengfei
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Paper Abstract

A comparison has been made between classical and ion-assisted deposition (IAD) on Zr02 thin films and the optical and mechanical properties, laser damage resistance, crystalline structure and surface microstructure of the films were investigated and analyzed.

Paper Details

Date Published: 22 December 1989
PDF: 6 pages
Proc. SPIE 1168, Current Developments in Optical Engineering and Commercial Optics, (22 December 1989); doi: 10.1117/12.963006
Show Author Affiliations
Gao Yang, Shanghai Precision Instrument Institute (PRC)
Zhou Pengfei, Shanghai Precision Instrument Institute (PRC)


Published in SPIE Proceedings Vol. 1168:
Current Developments in Optical Engineering and Commercial Optics
Robert E. Fischer; Harvey M. Pollicove; Warren J. Smith, Editor(s)

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