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Proceedings Paper

Error Analysis Of Measuring Planeness For Large Terrace By Laser Collimator
Author(s): Han Sen; Yang Daren; Li Xueyuan
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Paper Abstract

In t he paper. we have empha ii cal l y anal yzed and deduced a group of error formulas of measure' ng p1 oneness for large terrace by di agonal method from the pri nci pi e of unequal accuracy. 1 is accuracy i is hi gh. Old error formulas that are anal yzed and deduced from the equal act uracy have further been devel oped. At the same t i me, we have al so anal yzed I he accuracy of measuri ng planeness for 1 arge terrace by least area method and1 t dree-point method.

Paper Details

Date Published: 22 December 1989
PDF: 7 pages
Proc. SPIE 1168, Current Developments in Optical Engineering and Commercial Optics, (22 December 1989); doi: 10.1117/12.963003
Show Author Affiliations
Han Sen, Changchun Insitute of Optics and Fine Mechanics (China)
Yang Daren, Changchun Insitute of Optics and Fine Mechanics (China)
Li Xueyuan, Changchun Insitute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 1168:
Current Developments in Optical Engineering and Commercial Optics
Robert E. Fischer; Harvey M. Pollicove; Warren J. Smith, Editor(s)

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